A fully automatic thermal vacuum cleaning equipment specially designed for components of lithography machines and mask plates. Through a high-temperature and low-pressure environment and non-contact dry cleaning technology, it can thoroughly remove nano-level contaminants (such as organic residues and particles), meeting the strict requirements for ultra-clean surfaces in semiconductor manufacturing, flat panel display, and integrated circuit fields. It supports multi-scenario cleaning of wafers, optical lenses, vacuum chambers, etc.
Feature:
✅ Unmatched Cleaning Performance – Removes Sn residues (EUV), hydrocarbons, oxides, and sub-100nm particles for defect-free production.
✅ Smart Process Control – Automated recipes with pressure/temperature profiling for repeatable results.
✅ Multi-Technology Integration – Combine thermal, plasma, and ultrasonic cleaning in one system.
✅ Non-Destructive Cleaning – Gentle on EUV multilayer optics, reticles, and delicate sensors.
✅ SEMI & ISO-Compliant – Meets ISO Class 1 cleanliness standards with full traceability.
✅ 24/7 Production Ready – Designed for high-throughput semiconductor fabs with minimal downtime.
Critical Applications
1. EUV Lithography Systems
Mirror & Collector Optics Cleaning – Eliminates Sn droplets and carbon buildup.
Reticle & Pellicle Maintenance – Ensures zero mask defects.
Vacuum Chamber Conditioning – Prevents contamination in EUV source modules.
2. DUV Lithography & Advanced Packaging
Lens & Prism Decontamination – Stops haze formation.
Wafer Chuck & Stage Recovery – Restores optimal electrostatic clamping.
3. R&D & Failure Analysis
Prototype Surface Prep – Clean surfaces for SEM, TEM, XPS analysis.
Why Choose TESTEQ?
✅ Higher Yield – Reduces particle-related defects by >90% (verified in leading fabs).
✅ Longer Component Life – Extends service intervals for EUV nozzles, DUV lenses, and chucks.
✅ Faster ROI – Minimizes manual cleaning and requalification time.
✅ Custom Solutions – Tailored configurations for your specific components.
Request a Demo or Process Validation
TESTEQ systems are field-proven in top-tier semiconductor facilities. [Contact our team] to schedule a test with your components.
