Test EQ

Temperature Range: -70°C to +180°C

Altitude Simulation: Sea level to 43,000m (110-0.1 kPa)

Rapid decompression: Achieve 10,000m pressure differential (2,500m → 12,500m) within 15 seconds

Humidity Range: 10% to 98% RH

Chamber Capacity: 10 to 100 m³ (customizable)

Noise test：≤ 75dB

Patent Number: CN201520670413.0

Combine temperature and vibration for stress testing

Capacity：215 to 1100L（Customizable）

Temperature Range：-100 to +200℃

Consistency:  ≤20%(Higher than the industry standard)

Heating &Cooling Rate (average)：70℃/min

Vibration Frequency Range：5 to 10,000Hz

Vibration range：5 to 100GRMS

Vibration Overshoot：≤2GRMs

Patent Number:  CN201520670413.0

Capacity：0.5 m³ to 2.65 m³(Customizable)

High Vacuum Level (mbar)：5.0×10−7

No-load Vacuum Level (mbar)：5.0×10−7(Room temperature)

Vacuum Cube Leak Rate：1×10−9std/cc/sec

Pressure Regulation in 

Multiple Ranges (mbar/Torr)：Adjustable

Temperature Range： -190°C(LN2 cooling) to 150°C

Temperature Uniformity：±2℃

3-Axis AGREE Environmental Test Chamber

Temperature Range：-70℃ to +180℃

Temperature Fluctuation：≤ ± 0.5℃

Temperature Deviation：≤ ± 2.0℃

Temperature Uniformity：≤  2.0℃

Humidity Range (%RH)※2：10%～98% RH

Humidity Uniformity：±1.0 % RH

Patent Number: ZL. 2021 2 2673632.2

3-Axis AGREE Environmental Test Chamber

Temperature Range：-70℃ to +180℃

Temperature Fluctuation：≤ ± 0.5℃

Temperature Deviation：≤ ± 2.0℃

Temperature Uniformity：≤  2.0℃

Humidity Range (%RH)※2：10%～98% RH

Humidity Uniformity：±1.0 % RH
Patent Number: ZL 2021 2 2673632.2

3-Axis AGREE Environmental Test Chamber

Temperature Range：-70℃ to +180℃

Temperature Fluctuation：≤ ± 0.5℃

Temperature Deviation：≤ ± 2.0℃

Temperature Uniformity：≤  2.0℃

Humidity Range (%RH)※2：10%～98% RH

Humidity Uniformity：±1.0 % RH

Patent Number: ZL. 2021 2 2673632.2

Capacity : 300 to 1000L(Customizable)

Temperature Range:  -65℃ to +150℃

Preheating Temperature Range: +60℃ to +200℃

Heating Rate:  +60℃to +200℃≤20min

Precooling Temperature Range: -78℃ to 0℃

Cooling Rate: +20℃to -75℃ ≤70min

Benchtop environmental test chambers

Capacity: 22.5 to 64L

Temperature Range：-65℃ to +150℃  

Temperature Fluctuation：≤ ±0.5℃     

Temperature Deviation：≤ ± 2.0℃     

Humidity Range： 20% to 98%R.H  

Humidity Deviation：± 3.0% RH(>75%RH)

Noise test：≤ 68dB

Environmental tes chamber

Capacity:225 to 1000L

Rapid Temperature Range: -70℃ to +180℃( 200℃ is optional)     

Temperature Fluctuation : ≤± 0.5℃     

Temperature Deviation: ≤± 2.0℃     

Temperature Uniformity: ≤2.0℃ 

Humidity Range (%RH)※2: 10%～98% RH     

Humidity Uniformity: ±1.0 % RH 

Noise test：≤ 68dB

Temperature Range：-70°C to 100°C

Dew Point Temperature Range：7℃ to 87℃     

Extended Dew Point Conditions： -10℃     

Humidity Range：10%～98% RH   

Humidity Control：±2.5%RH     

Humidity Uniformity：±1.0 % RH

Noise test：≤ 68dB

Capacity：245 to 1000L

Temperature Range：-70℃ to +180℃

Temperature Fluctuation：≤ ±0.5℃

Temperature Deviation：≤ ±2.0℃

Temperature Uniformity：≤ 2.0℃

Humidity Range (%RH)※2：10%～98% RH

Humidity Uniformity：±1.0 % RH

Noise test：≤ 68dB

Temperature Altitude Chamber

Temperature Range: -70°C to +150°C

Altitude Simulation: Sea level to 43,000m (110-0.1 kPa)

Rapid decompression: Achieve 10,000m pressure differential (2,500m → 12,500m)  within 15 seconds

Humidity Range: 10% to 98% RH

Chamber Capacity: 0.125 to 8.9 m³ (customizable)

Noise test：≤ 68dB

Patent Number: CN202310792763.3

Capacity : 23 to 125L

Temperature Range: -65℃ to +150℃

Preheating Temperature Range: +60℃ to +200℃

Heating Rate: +60℃to +200℃ ≤20min

Precooling Temperature Range: -78℃ to 0℃

Cooling Rate: +20℃to -75℃ ≤70min

CE certified Liquid Thermal Shock Test Chamber

Precision control:  Tempeature accuracy: ±0.3°C(Ensure the consistency of the test environment)

Temperature uniformity:≤±0.5°C(Avoiding sample failure due to local temperature differences)

Ultra-wide temperature range (-65°C to +200°C): Chilled performance: The refrigeration system employs a cascade compression technology, capable of achieving a minimum temperature of -65℃, meeting the ultra-low temperature testing requirements for aerospace, semiconductors, and other fields.

Millisecond-level conversion speed (<10s Rapid Transition)

Thermal shock resistance verification: Specifically designed for glass/ceramic packaged components, it can simulate the sudden temperature change scenario of ΔT≥100°C (such as the cold start to high-temperature operation in automotive electronics).

TESTEQ Thermal Vacuum Cleaning System for High-Precision Semiconductor Components

Industry-Leading Contamination Removal for Lithography, Optics & Wafer Processing

This equipment adopts an innovative inclined sealing structure (patented design-Thermal Vacuum/Lithography/UHV). 

Through the gravity-adaptive cover plate and double-ring sealing ring interlocking technology, it can maintain a stable vacuum level (≤10⁻⁶ Pa), solving the problem of reduced cleaning efficiency caused by sealing failure in traditional equipment. 

It integrates a dual-fluid spray system (sodium hydroxide + deionized water), supporting non-destructive cleaning in a high-temperature (350℃) vacuum environment, avoiding thermal stress deformation.

 It is suitable for the maintenance of high-precision components such as mask plates, lens groups, and vacuum pump components of lithography machines, significantly improving chip yield and equipment lifespan.

Capacity(L): 500~50,000L（Customizable）

Working pressure:  -0.1~50MPa

Control Accuracy: ≤±0.0002 MPa

Pressurization Rate:Ambient Pressure→0.8MPa ≤30min

Depressurization Rate: 0.8MPa→Ambient Pressure ≥30min

Humidity Control:20–80% RH

Concentration: Adjustable 1–20 g/m³ (±0.5 g/m³ precision).

Temperature Range: -30°C to +80°C (±2°C stability).

Airflow Velocity: 1–20 m/s (variable for static/dynamic testing).

Volume: 0.6 m³ (standard) to 2.5 m³ (custom), with reinforced acrylic observation windows.

Test Duration:Programmable cycles (1–999 hours), IP5X/IP6X compliance modes.

Volume: 245L (3.5 ft³) to 1000L (70.6 ft³) (customizable).

Temperature Range: -40°C to 150°C (-40°F to 302°F)

Temperature Accuracy: ±0.5°C

Humidity Range: 20% to 98% RH

Humidity Accuracy: ±2% RH

Supported Gases: H₂S, SO₂, Cl₂, NO₂, etc.

Concentration Range: Adjustable from 0.1 ppm to 25 ppm (varies by gas type).

Capacity: 30 to 150 L (compact benchtop design).

Temperature Range: RT～200℃;（300～500℃ is optional）

Forced Convection: 2,000 CFM centrifugal fan with adjustable air velocity (3–10 m/s).

Air Exchange: 10–20 cycles/hour for rapid moisture removal.

Capacity : 3–12m³

Temperature Range: -40°C to +85°C (±1°C stability).

Salt Spray (NSS/AASS/CASS): 5% NaCl solution, pH 4.0–7.2 

Cyclic Conditions:  45~96%RH

Cycle Customization: 1–99 hrs

Spray System: 1.0–2.0 mL/hr per 80 cm²

Capacity: 50L to 500 L(customizable).

Temperature Range: 105°C to 150°C (±0.5°C uniformity).

Saturated Steam: Achieves 100% RH via pressurized pure water vapor.

Pressure Range: 0.1 MPa to 0.3 MPa (1–3 atm)

Cycle Duration: 24–168H (accelerated aging equivalent to 1,000H+ in standard 85°C/85% RH tests).

Capacity: 245 to 1,000 L (customizable)

Temperature Range:  -70°C to +180°C (±0.3°C uniformity, ±0.5°C stability).

Humidity Range: 20–98% RH with dew point control for lo-humidity battery dry-room simulations.

Safety Compliance: Explosion-proof design (ATEX Zone 2), hydrogen/CO venting, and multi-sensor gas detection.

Climate chamber manufacturers

Capacity：245 to 1000L

Temperature Range：-70℃ to +180℃

Temperature Fluctuation：≤ ± 0.5℃

Temperature Deviation：≤ ± 2.0℃

Temperature Uniformity：≤  2.0℃

Humidity Range (%RH)※2：10%～98% RH

Humidity Uniformity：±1.0 % RH

Pressure Range: Atmospheric pressure ~ 0.5kpa(or customize)

Capacity : 70 to 300L

Temperature Range: -65℃ to +150℃

Heating Rate:  +60°C to +200°C ≤  20min

Cooling Rate: From +20°C to -75°C ≤  70min

Heating Time ： RT~200°C / About 30mins   

Cooling Time： RT~75°C / About 30mins   

Capacity : 110–1,500 L 

Temperature Range: -40°C to +85°C (±1°C stability).

Salt Spray (NSS/AASS/CASS): 5% NaCl solution, pH 4.0–7.2 

Cyclic Conditions:  45~96%RH

Cycle Customization: 1–99 hrs

Spray System: 1.0–2.0 mL/hr per 80 cm²